Governor Kathy Hochul announced on April 9 that NY Creates has begun installing Tokyo Electron’s advanced 300mm wafer coater and developer system at the Albany NanoTech Complex. The new equipment, known as the CLEAN TRACK LITHIUS Pro DICE, is designed to support the next generation of semiconductor manufacturing and is the first major tool delivered for the upcoming High NA Extreme Ultraviolet (EUV) Lithography Center.
The arrival of this system marks a significant step as New York positions itself to lead in semiconductor research and development. The High NA EUV Lithography Center will be North America’s first publicly owned and accessible research site dedicated to this technology, supporting advancements in processors, memory, sensors, and more.
“This announcement showcases the importance of public-private partnerships and how we can work together to deliver for New Yorkers and the nation, providing cutting-edge technology to support groundbreaking manufacturing right here in this state,” Governor Hochul said.
In coming months, ASML’s High NA EUV lithography system—described as one of the most advanced machines ever created—will arrive at Albany NanoTech Complex. Its installation inside the new NanoFab Reflection building follows a recent construction milestone attended by Governor Hochul when workers placed its final steel beam. “First light,” or initial activation of the tool’s EUV light source, is expected before year-end.
The initiative was launched in December 2023 as part of a $10 billion partnership that includes $9 billion from industry leaders such as IBM, Micron, Applied Materials, Tokyo Electron, alongside $1 billion from Empire State Development. The goal is to establish a next-generation research center focused on developing complex semiconductors at Albany NanoTech Complex.
Empire State Development President, CEO and Commissioner Hope Knight said: “New York State has firmly established itself as a global hub of cutting-edge semiconductor research… These efforts are not only advancing the future of chip R&D but also creating high-quality jobs, expanding opportunity, and securing New York’s leadership in this critical industry for decades to come.”
The continued investment signals ongoing growth in New York’s semiconductor sector with expectations for further technological progress later this year.
